Session C3: "Microactuators / Microfluid Handling Devices"

Tuesday 14 June 2016, 10.00 – 12:20
Focke Wulff Saal

Session Chairs: K. Hjort / J.C. Lötters

Please note that all reviews will be given in the plenum in the Hanse Saal!

List of presentations

Time
No.
Title
10.00 – 10:30
C3.0
Integrated Systems for the Accurate Measurement and Control of Micro Liquid and Gas Flows (Review)
J.C. Lötters, Bronkhorst High-Tech B.V., Ruurlo, The Netherlands, and University of Twente, Enschede, The Netherlands
11:00 – 11:20
C3.1
Resonant Three-Dimensional Electrostatic Actuator in Silicon Technology
B. Goj*, Technische Universität Ilmenau, Ilmenau, Germany; L. Dressler, Technische Universität Ilmenau, Ilmenau, Germany; L. Dittrich, Technische Universität Ilmenau, Ilmenau, Germany; M. Hoffmann, Technische Universität Ilmenau, Ilmenau, Germany
11:20 – 11:40
C3.2
Mono-Dispersed Droplets Generation in the Flowing Ambient Liquid by Using an Ultrasonic Vibrator
T. Kanda, Okayama University, Okayama-shi, Japan; T. Yamada, Okayama University, Okayama-shi, Japan; K. Mori, Okayama University, Okayama-shi, Japan; K. Suzumori, Tokyo Institute of Technology, Tokyo, Japan
11:40 – 12:00
C3.3
Cost-Efficient Manufacturing of a High Deflection Electrothermal Drive for Switching Applications
M. El Khoury*, Technische Universität Darmstadt, Darmstadt, Germany; T. Winterstein, Technische Universität Darmstadt, Darmstadt, Germany; H.F. Schlaak, Technische Universität Darmstadt, Darmstadt, Germany
12:00 – 12:20
C3.4
SMA Shape-Memory Microvalves for Fluidic Systems
C. Megnin*, Albert-Ludwigs-Universität Freiburg, Freiburg, Germany; H. Ossmer, Karlsruher Institut für Technologie, Karlsruhe, Germany; M. Gültig, Karlsruher Institut für Technologie, Karlsruhe, Germany; T. Hanemann, Karlsruher Institut für Technologie, Karlsruhe, Germany; M. Kohl, Karlsruher Institut für Technologie, Karlsruhe, Germany

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